MO Source

Electronic Chemicals

金属前驱体是一类由金属中心和有机配体组成的金属基原料,用于在化学反应中生成特定的目标产物,在半导体、新能源等领域发挥着关键作用。其主要应用包括:半导体制造中的CVD/ALD薄膜沉积、锂离子电池正极材料(如高镍、NMC、钴酸锂)的合成、催化剂(如镍基和铂基前驱体)、航空航天与国防领域的功能涂层(如锆基热障涂层、隐身涂层)、光电器件(LED、光伏电池)以及科学研究(MOF、纳米材料等)。关键性能要求包括:电子级纯度达到99.999%或更高;良好的挥发性和稳定性(能够在蒸发后稳定地进行气相输送和分解,且不造成污染);分解清洁(副产物易于去除);以及安全性和工艺兼容性,要求低毒性和低腐蚀性。

Metal precursors are a class of metal-based raw materials composed of a metal center and an organic ligand, used to generate specific target products in chemical reactions, and play a key role in fields such as semiconductors and new energy. Their main applications include CVD/ALD thin-film deposition in semiconductor manufacturing, synthesis of cathode materials for lithium-ion batteries (e.g., high-nickel, NMC, lithium cobalt oxide), catalysts (e.g., nickel- and platinum-based precursors), functional coatings in aerospace and defense (e.g., zirconium-based thermal barrier coatings, stealth coatings), optoelectronic devices (LEDs, photovoltaic cells), and scientific research (MOFs, nanomaterials, etc.). Key performance requirements include an electronic-grade purity of 99.999% or higher, good volatility and stability (capable of stable gas-phase delivery and decomposition  upon evaporation without causing contamination), clean decomposition (with easily removable byproducts), as well as safety and process compatibility featuring low toxicity and low corrosivity.


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